MEMS based Thermal Mass Flow Technology
Axetris uses proprietary MEMS-based thermal mass flow measurement technology to design its range of mass flow solutions. The temperature differential of a miniscule sample of the gas is measured during flow across a MEMS chip (see picture).
The temperature differential thus measured results in a mass flow measurement that is the building block to a superior mass flow product. Compared with a conventional design, the MEMS-based solutions from Axetris signify a quantum leap in mass flow performance. World-class fluid engineering and smart software design further enhance the advantages inherent to the MEMS thermal mass flow technology.
The MEMS-based design of Axetris mass flow products translates into substantial advantages* for OEM customers:
|High Accuracy||upto 0.2% Full Scale (F.S.)|
|High Repeatability||upto 0.15% Of Reading (O.R.)|
|at least 1000:1|
|Low Flow Capability||Minimum Flow 0.02 sccm|
|Quick Settling time||150 ms (Settling Time for Controller)|
|Negligible Drift||Practically no re-calibration required|
Some of the smallest mass flow controllers in the
* Standard values, please consult product datasheet for exact values, or contact your Axetris sales representative to discuss your application requirements
Read more about MEMS-based Mass Flow Meters and Controllers from Axetris.